Auger Electron Spectroscopy

Auger Electron Spectroscopy

Auger Electron Spectroscopy (AES) is an analytical method for characterizing the surface (25-50 angstroms) chemistry of materials.


Range of Detectable Elements: All except Hydrogen and Helium

Detection Limits: Few atom percent

Area Sampled: Sub micrometer to several millimeters

Depth of Analysis: 25-50 angstroms
Modes of Analysis:

Survey Scan – Qualitative identification of elements present within the excited volume.

Elemental Mapping – Photographic images depicting variations in elemental concentration as variations in gray level of the image.

Concentration Depth Profiles – The ability to perform in situ argon ion etching provides a means for characterizing the elemental composition as a function of depth in the sample. Sensitivity factors are applied to the raw data to yield atomic concentrations.