EDS: Energy Dispersive X-Ray Spectroscopy

EDS: Energy Dispersive X-Ray Spectroscopy

Energy Dispersive X-Ray Spectroscopy (EDS) extends the usefulness of SEM in that elemental analysis & chemical characterization can be performed within regions as small as a few cubic micrometers. All elements from boron through the periodic table can be detected with sensitivities of approximately a few tenths of one percent.EDS Spectra displays a Graphical plot of peaks identifying elements detected within the area analyzed. The area analyzed can be adjusted to encompass sub micrometer or several millimeters. The intensity of peaks (peak height) is related to the elemental concentration.